Integrating carbon nanotubes (CNTs) and nanowires into devices for sensing, actuation and other nanoelectronic applications has the potential to increase device efficiency and lower power consumption. Examples include ultra-high frequency CNT filters and resonators for high sensitivity gas/mass detection. Reliable operation requires careful mechanical and electrical characterization of the integrated CNTs and their contact with electrodes. In this work, we demonstrate a fabrication strategy and integration of suspended single walled CNTs (SWCNTs) on a chip for investigation of the metal nanotube interfacial adhesion strength. A multi-step etching process is used to prepare SWCNTs integrated on TEM compatible chips. Alternating current (AC) dielectrophoresis (DEP) is used for selective SWCNT integration simultaneously overcoming localization issues. The suspended tubes are conducive to mechanical …
